GasPro PTFE Gas Filter TEM-100 Series
High-performance inline gas filter for semiconductor process gases and CDA of all grades, with a filtration precision of 0.003 microns.
GasPro filters are specially designed for filter applications of semiconductor process gases and CDA (Clean Dry Air) of all grades. They feature an all-welded structure that achieves a filtration precision of 0.003 microns even in high flow rate situations with limited space. The filters consist of a cartridge supported by a PTFE membrane and polypropylene, and an electropolished welded housing made of SUS316L. To ensure cleanliness, they are purged with filtered nitrogen before shipment. Various connection types are available for easy installation.
- Company：エア・ウォーター・メカトロニクス株式会社 ST事業部
- Price：Other
